[특허 요약] A method of forming a compound structure according to embodiments of the present disclosure comprises loading a metal precursor on a substrate, providing a chalcogen precursor to the substrate, and reacting the chalcogen precursor with the metal precursor. The metal precursor comprises transition metal nanoparticles. The compound structure has a 2-dimensional structure.

등록번호

12188120B

출원번호

202218047970

출원인

서울대학교산학협력단, 기초과학연구원

키워드

furnace, substrate, precursor, mos, chalcogen