[특허 요약] An apparatus for fixing sample and a manufacturing method therefor are provided. The apparatus for fixing sample according to the embodiments of the present invention comprises a substrate having a window hole, a first pattern disposed on the substrate and having a sample fixing hole, and a window layer disposed below the first pattern in the window hole. The sample fixing hole is disposed on the window layer. The method for manufacturing an apparatus for fixing sample comprises preparing a substrate having a first surface and a second surface, forming a first layer on the first surface and a second layer on the second surface, patterning the second layer to form a second pattern, etching the substrate using the second pattern as an etching mask to form a window hole exposing the first layer, patterning the first layer to form a first pattern having a sample fixing hole, and forming a window layer contacting the first pattern in the window hole. The sample fixing hole is formed at a position corresponding to the window hole.

등록번호

20250164361A

출원번호

202218294111

출원인

서울대학교산학협력단, 기초과학연구원

키워드

sample, pattern, layer, fixing, window