[특허 요약] A system for measuring displacement of an accelerating tube by using a micro-alignment telescope, which includes a vacuum chamber; a hollow accelerating tube in the vacuum chamber; a sighting target attached to a surface of the accelerating tube while protruding from the surface of the accelerating tube; the micro-alignment telescope spaced apart from one side surface of the vacuum chamber; a first lens device interposed between the micro-alignment telescope and the vacuum chamber; and a second lens device spaced apart from an opposite side surface of the vacuum chamber by a distance, wherein the vacuum chamber includes first and second viewports placed on the surfaces of the vacuum chamber in correspondence with each other, and the micro-alignment telescope, the first lens device, the first viewport, the sighting target, the second viewport and the second lens device are aligned on a same axis in one direction.

등록번호

10082385B

출원번호

201615160871

출원인

기초과학연구원

키워드

vacuum chamber, micro, accelerating tube, lens device, alignment telescope